Seal ring structure with  metal pad

ABSTRACT

A method includes providing a substrate having a seal ring region and a circuit region, forming a seal ring structure over the seal ring region, forming a first frontside passivation layer above the seal ring structure, etching a frontside aperture in the first frontside passivation layer adjacent to an exterior portion of the seal ring structure, forming a frontside metal pad in the frontside aperture to couple the frontside metal pad to the exterior portion of the seal ring structure, forming a first backside passivation layer below the seal ring structure, etching a backside aperture in the first backside passivation layer adjacent to the exterior portion of the seal ring structure, and forming a backside metal pad in the backside aperture to couple the backside metal pad to the exterior portion of the seal ring structure. Semiconductor devices fabricated by such a method are also provided.

PRIORITY DATA

The present application claims priority to U.S. Provisional ApplicationSer. No. 61/373,634, attorney docket number 24061.1553, filed Aug. 13,2010, the entire disclosure of which is incorporated herein by referencein its entirety.

BACKGROUND

the design and packaging of semiconductor integrated circuits (ICs),there are several areas of concern. Moisture needs to be prevented fromentering the circuits because: (1) moisture can be trapped in oxides andincrease the dielectric constant thereof; (2) moisture can createtrapped charge centers in gate oxides causing threshold voltage shiftsin complementary metal-oxide-semiconductor (CMOS) transistors; (3)moisture can create interface states at the Si-gate oxide interfacecausing degradation in the transistor lifetime through increasedhot-electron susceptibility; (4) moisture can cause corrosion of themetal interconnect, reducing the reliability of the IC; and (5) whentrapped in Si-oxide, moisture can reduce the oxide mechanical strengthand the oxide may become more prone to cracking due to tensile stress.Ionic contaminants can also cause damage to the IC as they can diffuserapidly in silicon oxide. For instance, ionic contaminants can causethreshold voltage instability in CMOS transistors and alter the surfacepotential of the Si surface in the vicinity of the ionic contaminants.Dicing processes that separate adjacent IC dies from one another mayalso cause potential damage to the IC.

A seal ring has been used in the industry to protect the IC frommoisture degradation, ionic contamination, and dicing processes, butimprovement has been desirable. In particular, a dicing process using amechanical die saw may cause peeling of layers from the die saw cuttingforces. Backside illuminated devices having inter-metal or interlayerdielectric films with low dielectric constants (low-k) are especiallyprone to die saw peeling. Accordingly, improved methods of semiconductordevice fabrication and devices fabricated by such methods are desired.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 is a flowchart illustrating a method for fabricating asemiconductor device with a seal ring structure having a metal pad forpreventing die saw peeling according to various aspects of the presentdisclosure.

FIG. 2 is a top plan view of an integrated circuit (IC) die with a sealring structure according to various aspects of the present disclosure.

FIGS. 3A and 3B are cross-sectional views along line I-I′ in FIG. 2 ofalternative seal ring sections according to various aspects of thepresent disclosure.

FIG. 4 is a cross-sectional view of an embodiment of the device showingblocked die saw effects according to various aspects of the presentdisclosure.

FIG. 5 is a cross-sectional view of a previous seal ring structureshowing die saw effects on the previous semiconductor device.

FIGS. 6A-6F are cross-sectional views of the semiconductor device atvarious stages of fabrication according to various aspects of thepresent disclosure.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the invention. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Moreover,the formation of a first feature over or on a second feature in thedescription that follows may include embodiments in which the first andsecond features are formed in direct contact, and may also includeembodiments in which additional features may be formed interposing thefirst and second features, such that the first and second features maynot be in direct contact. Various features may be arbitrarily drawn indifferent scales for simplicity and clarity.

Referring to the figures, FIG. 1 illustrates a flowchart of a method 100for fabricating a semiconductor device with a seal ring structure havinga metal pad for preventing or blocking die saw peeling effects on thedevice according to various aspects of the present disclosure. FIG. 2 isa top plan view of a semiconductor device including an integratedcircuit (IC) die and a seal ring structure around the IC die accordingto various aspects of the present disclosure. FIGS. 3A and 3B arecross-sectional views of alternative embodiments of the seal ringstructure 210 according to various aspects of the present disclosure.FIG. 4 is a cross-sectional view of an embodiment of the seal ringstructure of FIG. 3 showing blocked die saw effects on the semiconductordevice according to various aspects of the present disclosure. Incontrast, FIG. 5 illustrates a cross-sectional view of a previous sealring structure showing die saw peeling effects on the device. FIGS. 6Athrough 6F illustrate cross-sectional views of the semiconductor deviceat various stages of fabrication according to aspects of the presentdisclosure.

It is noted that similar features may be similarly numbered for the sakeof simplicity and clarity. It is further noted that part of thesemiconductor device 200 may be fabricated with a CMOS process flow.Accordingly, it is understood that additional processes may be providedbefore, during, and after the method 100 of FIG. 1, and that some otherprocesses may only be briefly described herein. The semiconductor device200 may be fabricated to include a backside illuminated (BSI) devicehaving an interlayer dielectric (ILD) such as a low-k inter-metaldielectric (IMD).

Referring now to FIG. 1, method 100 begins with block 102 in which asemiconductor substrate is provided having a seal ring region and acircuit region. In an embodiment, the seal ring region is formed aroundthe circuit region, and the seal ring region is for forming a seal ringstructure thereon and the circuit region is for at least forming atransistor device therein. The method 100 continues with block 104 inwhich an integrated circuit is formed over the circuit region and a sealring structure is formed over the seal ring region. The method 100continues with block 106 in which a first frontside passivation layer isformed over the seal ring structure in the seal ring region, and withblock 108 in which a frontside aperture is etched in the first frontsidepassivation layer adjacent to an exterior portion of the seal ringstructure. The method continues with block 110 in which a frontsidemetal pad is formed in the frontside aperture of the first frontsidepassivation layer to couple the first metal pad to the exterior portionof the seal ring structure. At block 112, a second frontside passivationlayer is formed above the frontside metal pad, and at block 114,backside processing is performed including wafer bonding of the secondfrontside passivation layer to a carrier wafer and substrate etching tothin the substrate.

The method 100 continues with block 116 in which a first backsidepassivation layer is formed under the seal ring structure, and with bock118 in which a backside aperture is etched in the first backsidepassivation layer adjacent to the exterior portion of the seal ringstructure. At block 120, a backside metal pad is formed in the backsideaperture of the first backside passivation layer to couple the backsidemetal pad to the exterior portion of the seal ring structure. At block122, a second backside passivation layer is formed under the backsidemetal pad. Other layers, lines, vias, and structures may also beprovided before, during, or after the steps of method 100.Advantageously, because the metal pads are coupled to the exteriorportion of the seal ring structure and their respective passivationlayers, die saw peeling effects are blocked from affecting an interiorportion of the seal ring structure and therefore the integrated circuitis also protected.

Referring now to FIG. 2, a top plan view of a device 200 is illustratedincluding an integrated circuit (IC) die 202, a seal ring structure 210around the IC die 202, and an assembly isolation region 204 therebetweenaccording to various aspects of the present disclosure. Alternativecross-sectional views of the seal ring region along line I-I′ areillustrated in FIGS. 3A and 3B.

Referring now to FIG. 3A in conjunction with FIG. 2, a cross-sectionalview of an embodiment of semiconductor device 200 at a stage offabrication according to the method 100 of FIG. 1 is illustrated. Thesemiconductor device 200 may include a semiconductor substrate 230 suchas a silicon substrate (e.g., a p-doped substrate) having a seal ringregion 201 and assembly isolation region 204 surrounding IC die 202 in acircuit region. In an embodiment, the seal ring region 201 is formedaround the circuit region, and the seal ring region is for forming aseal ring structure thereon and the circuit region is for forming atleast a transistor device therein. The substrate 230 may alternativelyinclude silicon germanium, gallium arsenic, or other suitablesemiconductor materials. The substrate 230 may further include dopedregions, such as a P-well, an N-well, and/or a doped active region suchas a P+ doped active region. In one aspect, the doped active regions maybe disposed within other regions. The substrate 230 may further includeother features such as a buried layer, and/or an epitaxy layer.Furthermore, the substrate 230 may be a semiconductor on insulator suchas silicon on insulator (SOI). In other embodiments, the semiconductorsubstrate 230 may include a doped epitaxy layer, a gradientsemiconductor layer, and/or may further include a semiconductor layeroverlying another semiconductor layer of a different type such as asilicon layer on a silicon germanium layer. In other examples, acompound semiconductor substrate may include a multilayer siliconstructure or a silicon substrate may include a multilayer compoundsemiconductor structure.

The device 200 may further include isolation structures, such as shallowtrench isolation (STI) features or LOCOS features formed in thesubstrate 230 for isolating active regions from other regions of thesubstrate. The active regions may be configured as an NMOS device (e.g.,nFET) or as a PMOS device (e.g., pFET) in one example.

The device 200 may further include dummy gate and/or gate structures(not shown) overlying the substrate 230, which may be formed fromvarious material layers and by various etching/patterning techniquesover various regions of device 200.

The device 200 further includes contact bars 218 to electrically coupleactive regions to the subsequently formed seal ring structure 210(including an exterior portion 210 a and an interior portion 210 b). Itis noted that other layers may be provided in the seal ring region toform various features over and/or under the seal ring structure such aspassivation layers, nitride layers, and polyimide layers deposited byCVD, spin-on techniques, or the like.

The semiconductor substrate 230 may further include underlying layers,overlying layers, devices, junctions, and other features formed duringprior process steps or which may be formed during subsequent processsteps.

Device 200 includes seal ring structure 210 disposed over substrate 230in the seal ring region 201. Seal ring structure 210 may be comprised ofvarious stacked conductive layers 212 and via layers 214 disposedthrough dielectric layers 216, and may have a width between about 5microns and about 15 microns in one example. Seal ring structure 210 isfurther comprised of an exterior portion 210 a adjacent the chip edgeand scribe line and an interior portion 210 b adjacent the assemblyisolation 204 and the circuit region.

A first frontside passivation layer 226 is disposed over the seal ringstructure 210. In one example, the first frontside passivation layer 226may be deposited by a high aspect ratio process (HARP) and/or a highdensity plasma (HDP) CVD process. In one example, the first frontsidepassivation layer 226 includes a dielectric and is an oxide.

Device 200 further includes a first metal pad or frontside metal pad 224in the first frontside passivation layer 226. The first metal pad orfrontside metal pad 224 is coupled to exterior portion 210 a of the sealring structure 210, and in one example the frontside metal pad 224 iscoupled to a top metal layer of the exterior portion 210 a of the sealring structure 210. In one example, frontside metal pad 224 may becomprised of aluminum and the metal layers of the seal ring structuremay be comprised of copper. Other metals may be applicable.

A second frontside passivation layer 222 may be disposed over thefrontside metal pad 224 and the first frontside passivation layer 226. Acarrier wafer 220 may then be bonded to the second frontside passivationlayer 222.

In one embodiment, substrate 230 may include an underlying firstbackside passivation layer as a bottom layer in the seal ring region. Inone example, the first backside passivation layer may be formed bydeposition of an oxygen dopant or deposition of a passivation layer by ahigh aspect ratio process (HARP) and/or a high density plasma (HDP) CVDprocess. In one example, the first backside passivation layer includes adielectric (ILD or IMD) and is an oxide. Furthermore, in one example,the substrate 230 may be thinned by an etch prior to the formation ofthe first backside passivation layer.

Device 200 further includes a second metal pad or backside metal pad 232in the substrate 230 (e.g., a first backside passivation layer). In thisembodiment, the backside metal pad 232 is directly coupled to exteriorportion 210 a of the seal ring structure 210, and in one example thebackside metal pad 232 is directly coupled to a bottom metal layer ofthe exterior portion 210 a of the seal ring structure 210. In oneexample, backside metal pad 232 may be comprised of aluminum and themetal layers of the seal ring structure may be comprised of copper.Other metals may be applicable.

A second backside passivation layer 233, 234 may be disposed over thesecond metal pad or backside metal pad 232 and the substrate 230. In oneexample, backside passivation layer 233 may be comprised of siliconoxide and backside passivation layer 234 may be comprised of siliconnitride. The metal pads and various passivation layers may undergopatterning and etch steps to form the structure profiles as desired.

It is understood that the semiconductor device 200 may undergo furtherprocessing in the circuit region to form various features such ascontacts/vias, interconnect metal layers, interlayer dielectric,passivation layers, etc. to form semiconductor circuits as is known inthe art. It is further understood that in some embodiments,semiconductor device 200 may only include a frontside metal pad or abackside metal pad and not both metal pads.

Referring now to FIG. 3B, an alternative embodiment of the seal ringstructure 210 and device 200 are illustrated. The various structures aresubstantially similar to the embodiment disclosed in FIG. 3A and thedescriptions of common structures are not repeated here although fullyapplicable in this embodiment as well. In this embodiment, second metalpad or backside metal pad 232 is not directly coupled to the bottommetal layer of the exterior portion 210 a of the seal ring structure210. Instead, backside metal pad 232 is coupled to contact 218 which iscoupled to the bottom metal layer of the seal ring structure.Accordingly, backside metal pad 232 is electrically coupled to the sealring structure but indirectly through contact 218.

Referring now to FIGS. 4 and 5, FIG. 4 is a cross-sectional view of anembodiment of the seal ring structure of FIG. 3A showing blocked die saweffects on the semiconductor device 200 according to various aspects ofthe present disclosure, and in contrast, FIG. 5 illustrates across-sectional view of a previous seal ring structure showing die sawpeeling effects on the device. Die saw effects, as illustrated by jaggedlines 240 a through 240 c, are blocked by the metal pads 224 and 232 atthe exterior portion 210 a of the seal ring structure, therebyprotecting the interior portion 210 b of the seal ring structure fromdie saw peeling effects and thereby protecting the interior circuitdevice from layer peeling. The metal pads 224 and 232, which are coupledto and contact the exterior portion of the seal ring structure and whichare further coupled to the frontside and backside passivation layers,respectively, block the die saw peeling effects from traversing to theinterior portion of the seal ring structure and the interior circuitdevice.

In contrast, FIG. 5 illustrates die saw peeling effects as shown by thejagged lines 340 a through 340 c traversing to the interior portion 210b of the seal ring structure because of the lack of metal pads 224and/or 232 (FIG. 4). In particular, FIG. 5 illustrates die saw peelingeffects 340 a-340 c shown along the interfaces of the passivation layers222, 230, and 234 but FIG. 4 illustrates die saw peeling effects 240a-240 c blocked by metal pads 224 and 232. In one embodiment, a diamondcutter instead of a laser may be used to cut along the scribe lines of adevice having seal ring structures including metal pads according toaspects of the present disclosure, thereby reducing manufacturing costs.

FIGS. 6A through 6F illustrate cross-sectional views of the device 200at various stages of fabrication according to aspects of the presentdisclosure. FIG. 6A illustrates the forming of a substrate 230 a, a sealring structure 210 over the seal ring region, and a first passivationlayer 226 over the seal ring structure 210. In this embodiment, acontact 218 is removed under the exterior portion 210 a of the seal ringstructure 210, although in other embodiments contact 218 may remainunder the exterior portion 210 a of the seal ring structure 210.

FIG. 6B illustrates an etch of the first passivation layer 226 to form afrontside aperture 252 and then the deposition and etch of a metal inthe frontside aperture 252 to form first metal pad or frontside metalpad 224. The frontside aperture 252 is adjacent to a top metal layer ofthe exterior portion 210 a of the seal ring structure, and the frontsidemetal pad 224 is directly coupled to the top metal layer of seal ringexterior portion 210 a.

FIG. 6C illustrates the forming of a second frontside passivation layer222 over frontside metal pad 224 and the first frontside passivationlayer 226.

FIG. 6D illustrates backside processing including the bonding of carrierwafer 220 to the second frontside passivation layer 222, and an etch ofsubstrate 230 a to thin the substrate layer.

FIG. 6E illustrates the subsequent forming of first backside passivationlayer 230 under the seal ring structure. In one embodiment, firstbackside passivation layer 230 formed by deposition of an oxygen dopantor deposition of a passivation layer by a high aspect ratio process(HARP) and/or a high density plasma (HDP) CVD process. In one example,the first backside passivation layer includes a dielectric (ILD or IMD)and is an oxide.

FIG. 6F illustrates an etch of the second passivation layer 230 to forma backside aperture 250 and then the deposition and etch of a metal inthe second aperture 250 to form second metal pad or backside metal pad232. The second aperture 250 is adjacent to a bottom metal layer of theexterior portion 210 a of the seal ring structure, and the backsidemetal pad 232 is directly coupled to the bottom metal layer of exteriorportion 210 a. FIG. 6F further illustrates the forming of passivationlayers 233 and 234 below backside metal pad 232 and second passivationlayer 230.

In one example, the metal pads 224 and 232 are deposited in respectiveapertures by CVD, PVD, or other suitable process, and subsequentlypatterned, for example by standard photolithography patterning and etchtechniques. In a further example, metal pads 224 and 232 are comprisedof aluminum although other metals, such as titanium, tungsten, copper,may be applicable.

The present disclosure provides for many different embodiments and themethods, techniques, and structures of the present disclosure may beused in a CMOS image sensor (CIS) backside illuminated (BSI) product,and products which need wafer bonding processes such as inmicroelectromechanical systems (MEMS) products. Furthermore,semiconductor devices may be formed having a frontside metal pad coupledto a seal ring structure, a backside metal pad coupled to a seal ringstructure, or both metal pads coupled to a seal ring structure.

One of the broader forms of the present disclosure involves asemiconductor device. The semiconductor device includes a substratehaving a seal ring region and a circuit region, a seal ring structuredisposed over the seal ring region, a first frontside passivation layerdisposed above the seal ring structure, and a frontside metal pad in thefirst frontside passivation layer, the frontside metal pad coupled to anexterior portion of the seal ring structure. The device further includesa second frontside passivation layer disposed above the frontside metalpad, a carrier wafer bonded to the second frontside passivation layer,and a first backside passivation layer disposed below the seal ringstructure.

Another of the broader forms of the present disclosure involves asemiconductor device including a substrate having a seal ring region anda circuit region, a seal ring structure disposed in the seal ringregion, a first frontside passivation layer disposed above the seal ringstructure, a first backside passivation layer below the seal ringstructure, and backside metal pad in the first backside passivationlayer, the backside metal pad coupled to the exterior portion of theseal ring structure. The device further includes a second backsidepassivation layer disposed below the backside metal pad.

Another of the broader forms of the present disclosure involves asemiconductor device including a substrate having a seal ring region anda circuit region, a seal ring structure disposed over the seal ringregion, a first passivation layer disposed over the seal ring structure,and a first metal pad in the first passivation layer, the first metalpad coupled to an exterior portion of the seal ring structure. Thedevice further includes a second passivation layer disposed under theseal ring structure, and a second metal pad in the second passivationlayer, the second metal pad coupled to the exterior portion of the sealring structure.

Another of the broader forms of the present disclosure involves a methodof fabricating a semiconductor device. The method includes providing asubstrate having a seal ring region and a circuit region, forming a sealring structure over the seal ring region, forming a first frontsidepassivation layer above the seal ring structure, etching a frontsideaperture in the first frontside passivation layer adjacent to anexterior portion of the seal ring structure, and forming a frontsidemetal pad in the frontside aperture to couple the frontside metal pad tothe exterior portion of the seal ring structure. The method furtherincludes forming a first backside passivation layer below the seal ringstructure, etching a backside aperture in the first backside passivationlayer adjacent to the exterior portion of the seal ring structure, andforming a backside metal pad in the backside aperture to couple thebackside metal pad to the exterior portion of the seal ring structure.

The foregoing has outlined features of several embodiments so that thoseskilled in the art may better understand the detailed description thatfollows. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device, comprising: a substratehaving a seal ring region and a circuit region; a seal ring structuredisposed over the seal ring region; a first frontside passivation layerdisposed above the seal ring structure; a frontside metal pad in thefirst frontside passivation layer, the frontside metal pad coupled to anexterior portion of the seal ring structure; a second frontsidepassivation layer disposed above the frontside metal pad; a carrierwafer bonded to the second frontside passivation layer; and a firstbackside passivation layer disposed below the seal ring structure. 2.The semiconductor device of claim 1, wherein the seal ring structure iscomprised of a stack of metal layers disposed around the circuit region.3. The semiconductor device of claim 1, wherein the frontside metal padis comprised of aluminum.
 4. The semiconductor device of claim 1,wherein the first frontside passivation layer and the first backsidepassivation layer are comprised of silicon oxide.
 5. The semiconductordevice of claim 1, wherein the second frontside passivation layer iscomprised of silicon oxide and/or silicon nitride.
 6. The semiconductordevice of claim 1, wherein the frontside metal pad is directly coupledto a top metal layer of the seal ring structure.
 7. The semiconductordevice of claim 1, wherein the first and second frontside passivationlayers are comprised of the same material or different material.
 8. Thesemiconductor device of claim 1, further comprising: a backside metalpad in the first backside passivation layer, the backside metal padcoupled to the exterior portion of the seal ring structure; and a secondbackside passivation layer disposed below the backside metal pad.
 9. Asemiconductor device, comprising: a substrate having a seal ring regionand a circuit region; a seal ring structure disposed in the seal ringregion; a first frontside passivation layer disposed above the seal ringstructure; a first backside passivation layer below the seal ringstructure; a backside metal pad in the first backside passivation layer,the backside metal pad coupled to the exterior portion of the seal ringstructure; and a second backside passivation layer disposed below thebackside metal pad.
 10. The semiconductor device of claim 9, wherein theseal ring structure is comprised of a stack of metal layers disposedaround the circuit region.
 11. The semiconductor device of claim 9,wherein the backside metal pad is comprised of aluminum.
 12. Thesemiconductor device of claim 9, wherein the backside metal pad iseither directly coupled to a bottom metal layer of the seal ringstructure or coupled to a contact that is coupled to the bottom metallayer of the seal ring structure.
 13. The semiconductor device of claim9, wherein the first backside passivation layer is comprised of siliconoxide and the second backside passivation layer is comprised of siliconnitride.
 14. The semiconductor device of claim 9, wherein the first andsecond backside passivation layers are comprised of the same material ordifferent material.
 15. The semiconductor device of claim 9, furthercomprising: a frontside metal pad in the first frontside passivationlayer, the frontside metal pad coupled to the exterior portion of theseal ring structure; a second frontside passivation layer disposed abovethe frontside metal pad and the first frontside passivation layer; and acarrier wafer bonded to the second frontside passivation layer.
 16. Amethod of fabricating a semiconductor device, the method comprising:providing a substrate having a seal ring region and a circuit region;forming a seal ring structure over the seal ring region; forming a firstfrontside passivation layer above the seal ring structure; etching afrontside aperture in the first frontside passivation layer adjacent toan exterior portion of the seal ring structure; forming a frontsidemetal pad in the frontside aperture to couple the frontside metal pad tothe exterior portion of the seal ring structure; forming a firstbackside passivation layer below the seal ring structure; etching abackside aperture in the first backside passivation layer adjacent tothe exterior portion of the seal ring structure; and forming a backsidemetal pad in the backside aperture to couple the backside metal pad tothe exterior portion of the seal ring structure.
 17. The method of claim16, wherein the frontside metal pad is coupled to a top metal layer ofthe seal ring structure.
 18. The method of claim 16, wherein thebackside metal pad is coupled to a bottom metal layer of the seal ringstructure.
 19. The method of claim 16, further comprising forming asecond frontside passivation layer above the frontside metal pad and/orforming a second backside passivation layer below the backside metalpad.
 20. The method of claim 19, further comprising: wafer bonding acarrier wafer to the second frontside passivation layer; and backsideetching the substrate.